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ZMI-4104C ZYGO 控制系統(tǒng) DCS 位移測量模塊是 ZYGO 公司（現(xiàn)為 AMETEK 旗下品牌）推出的一款高精度位移測量設(shè)備，專為工業(yè)自動化和精密測量應(yīng)用設(shè)計(jì)。

1. 產(chǎn)品概述

型號：ZMI-4104C

制造商：ZYGO（AMETEK 旗下品牌）

類別：位移測量模塊，適用于 DCS（分布式控制系統(tǒng)）

應(yīng)用領(lǐng)域：半導(dǎo)體制造、光學(xué)加工、精密機(jī)械、科研實(shí)驗(yàn)等

2. 技術(shù)規(guī)格

測量原理：基于干涉儀技術(shù)，利用激光干涉原理實(shí)現(xiàn)高精度位移測量。

分辨率：亞納米級（具體分辨率根據(jù)型號配置，如 0.15 nm、0.31 nm 等）。

測量范圍：支持?jǐn)U展到多達(dá) 64 個(gè)測量軸，滿足復(fù)雜系統(tǒng)的多維度測量需求。

最大速度：±2.55 m/s（具體速度根據(jù)型號配置）。

精度：在最大速度下，精度可達(dá) 0.2 nm（σ）。

兼容性：兼容 ZYGO 的 ZMI? 系列激光器（如 7705、7702、7714 和 7724）。

接口：支持 VME 機(jī)箱模塊化安裝，便于系統(tǒng)集成。

3. 功能特點(diǎn)

高精度測量：利用 ZYGO 專有的干涉儀技術(shù)，提供亞納米級的位移分辨率，適用于精密測量場景。

多軸擴(kuò)展：支持多達(dá) 64 個(gè)測量軸，滿足復(fù)雜系統(tǒng)的多維度測量需求。

高速測量：最大測量速度可達(dá) ±2.55 m/s，適用于高速運(yùn)動物體的位移監(jiān)測。

模塊化設(shè)計(jì)：采用 6U VME 或 6U VME64x 板卡類型，便于集成到現(xiàn)有的 DCS 系統(tǒng)中。

循環(huán)誤差補(bǔ)償：具備循環(huán)誤差補(bǔ)償功能，可自動消除系統(tǒng)誤差，提高測量精度。

兼容性強(qiáng)：兼容多種 ZYGO 激光器，方便用戶根據(jù)需求選擇合適的激光源。

4. 應(yīng)用場景

半導(dǎo)體制造：用于晶圓加工、光刻機(jī)等設(shè)備的位移監(jiān)測，確保加工精度。

光學(xué)加工：在光學(xué)元件的精密加工中，實(shí)時(shí)監(jiān)測工件的位移和形變。

精密機(jī)械：用于高精度機(jī)床、坐標(biāo)測量機(jī)（CMM）等設(shè)備的位移測量。

科研實(shí)驗(yàn)：在材料科學(xué)、納米技術(shù)等領(lǐng)域，提供高精度的位移數(shù)據(jù)支持。

5. 優(yōu)勢

高精度與高速度：結(jié)合亞納米級分辨率和高速測量能力，滿足精密制造和科研的高要求。

靈活擴(kuò)展：支持多軸測量，適應(yīng)不同規(guī)模和復(fù)雜度的系統(tǒng)需求。

易于集成：模塊化設(shè)計(jì)，便于與現(xiàn)有的 DCS 系統(tǒng)集成，降低系統(tǒng)升級成本。

可靠性高：ZYGO 作為精密測量領(lǐng)域的領(lǐng)先品牌，產(chǎn)品經(jīng)過嚴(yán)格測試，確保長期穩(wěn)定運(yùn)行。

6. 市場反饋

行業(yè)認(rèn)可：ZYGO 的 ZMI 系列位移測量模塊在半導(dǎo)體、光學(xué)和精密制造領(lǐng)域享有盛譽(yù)，被多家知名企業(yè)采用。

技術(shù)領(lǐng)先：憑借專利的干涉儀技術(shù)和誤差補(bǔ)償算法，ZMI-4104C 在同類產(chǎn)品中具有明顯的技術(shù)優(yōu)勢。

The ZMI-4104C ZYGO control system DCS displacement measurement module is a high-precision displacement measurement device launched by ZYGO company (now a brand under AMETEK), designed specifically for industrial automation and precision measurement applications.

1. Product Overview

model: ZMI-4104C

Manufacturer: ZYGO (a brand under AMETEK)

Category: Displacement Measurement Module, Suitable for DCS (Distributed Control System)

Application areas: semiconductor manufacturing, optical processing, precision machinery, scientific research experiments, etc

2. Technical specifications

Measurement principle: Based on interferometer technology, high-precision displacement measurement is achieved using laser interference principle.

Resolution: Sub nanometer level (specific resolution depends on model configuration, such as 0.15 nm, 0.31 nm, etc.).

Measurement range: Supports expansion to up to 64 measurement axes, meeting the multidimensional measurement needs of complex systems.

Maximum speed: ± 2.55 m/s (specific speed according to model configuration).

Accuracy: At maximum speed, the accuracy can reach 0.2 nm (σ).

Compatibility: Compatible with ZYGO's ZMI ?  Series lasers (such as 7705, 7702, 7714, and 7724).

Interface: Supports modular installation of VME chassis for easy system integration.

3. Functional features

High precision measurement: Utilizing ZYGO's proprietary interferometer technology, it provides sub nanometer displacement resolution, suitable for precision measurement scenarios.

Multi axis expansion: Supports up to 64 measurement axes to meet the multidimensional measurement needs of complex systems.

High speed measurement: The maximum measurement speed can reach ± 2.55 m/s, suitable for displacement monitoring of high-speed moving objects.

Modular design: adopting 6U VME or 6U VME64x board types, making it easy to integrate into existing DCS systems.

Cyclic error compensation: It has the function of cyclic error compensation, which can automatically eliminate system errors and improve measurement accuracy.

Strong compatibility: Compatible with multiple ZYGO lasers, making it convenient for users to choose the appropriate laser source according to their needs.

4. Application scenarios

Semiconductor manufacturing: used for displacement monitoring of equipment such as wafer processing and lithography machines to ensure processing accuracy.

Optical processing: Real time monitoring of displacement and deformation of workpieces in precision machining of optical components.

Precision machinery: used for displacement measurement of high-precision machine tools, coordinate measuring machines (CMM) and other equipment.

Research experiments: Provide high-precision displacement data support in fields such as materials science and nanotechnology.

5. Advantages

High precision and high speed: Combining sub nanometer resolution and high-speed measurement capabilities, it meets the high requirements of precision manufacturing and scientific research.

Flexible Expansion: Supports multi axis measurement and adapts to system requirements of different scales and complexities.

Easy to integrate: Modular design facilitates integration with existing DCS systems, reducing system upgrade costs.

High reliability: As a leading brand in the field of precision measurement, ZYGO's products undergo rigorous testing to ensure long-term stable operation.

6. Market feedback

Industry recognition: ZYGO's ZMI series displacement measurement module enjoys a high reputation in the fields of semiconductor, optics, and precision manufacturing, and has been adopted by many well-known enterprises.

Technological leadership: With patented interferometer technology and error compensation algorithms, ZMI-4104C has significant technological advantages among similar products.